An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films
نویسندگان
چکیده
An electrostatic actuator and mechanical-amplifier (MA) device has been designed and fabricated to study fatigue properties of low-stress LPCVD silicon nitride thin films. The device consists of two resonators connected serially with a common torsion bar. When pumping electrostatic energy into the first resonator, the energy is transferred to the second resonator via the common torsion bar. The mechanical m A d t f e t ( ©
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